Semiconductor

Detecting wafer notch position with a 2D laser profiler eliminates the risk of missing the notch when the wafer is slightly warped.

By monitoring the home position of the end effector, you can detect minute changes before they cause a collision between the wafer and wafer carrier. Using a long range displacement sensor enables end effector position measurement through a viewport.

Measure the profile of a wafer edge. By selecting one of the inspection tools such as Height Difference/Width or Angle, users can start measurement easily. The high-resolution image capturing using 3200 points/profile achieves highly accurate profile measurement that was impossible with conventional methods.

Highly glossy grooves can be difficult to inspect using non-contact measuring instruments due to diffuse reflections and other factors. The LJ-X Series, however, includes unique functions that can suppress such effects for stable shape measurement.