Eccentricity measurement of a susceptor
Semiconductor manufacturing
Abnormal eccentricity causes irregular parts to be created
- Benefit
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High speed sampling and high accuracy measurements can increase cycle time
LEARN THE DETAILS OF THE PRODUCT
- LK-G5000 series
Ultra High-Speed/High-Accuracy Laser Displacement Sensor -
This sensor utilises laser triangulation to balance best-in-class speed and accuracy to provide excellent performance for a wide range of applications.
- LK-G5000 series
- LK-G3000 series
High-speed, High-accuracy CCD Laser Displacement Sensor -
6 sensor-heads are available with the newly-developed algorithm and 2 types of optical systems.
- LK-G3000 series
